A framework for standard modular simulation in semiconductor wafer fabrication systems

Full Text: PDFPDF Buy this ArticleBuy this Article
Authors: José A. Ramírez-Hernández University of Cincinnati, Cincinnati, OH
Heshan Li University of Cincinnati, Cincinnati, OH
Emmanuel Fernandez University of Cincinnati, Cincinnati, OH
Charles McLean National Institute of Standards and Technology, Gaithersburg, MD
Swee Leong National Institute of Standards and Technology, Gaithersburg, MD
A framework for standard modular simulation in semiconductor wafer fabrication systems 2005 Article
Bibliometrics Data  Bibliometrics
· Downloads (6 Weeks): 1
· Downloads (12 Months): 13
· Downloads (cumulative): 240
· Citation Count: 2

Published in:
Cover Image
 
· Proceeding
WSC '05 Proceedings of the 37th conference on Winter simulation
Pages 2162-2171
Winter Simulation Conference ©2005
table of contents ISBN:0-7803-9519-0

Tools and Resources

Share:

|
feedback Feedback | Switch to single page view (no tabs)

Powered by The ACM Guide to Computing Literature


The ACM Digital Library is published by the Association for Computing Machinery. Copyright © 2013 ACM, Inc.
Terms of Usage   Privacy Policy   Code of Ethics   Contact Us

Useful downloads: Adobe Acrobat    QuickTime    Windows Media Player    Real Player
The ACM Guide to Computing Literature
All Tags
Export Formats
 
 
Save to Binder