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From micro to nano: MEMS as an interface to the nano world

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Author: Bernhard E. Boser University of California, Berkeley, California
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· Proceeding
ICCAD '06 Proceedings of the 2006 IEEE/ACM international conference on Computer-aided design
ACM New York, NY, USA ©2006
table of contents ISBN:1-59593-389-1 doi>10.1145/1233501.1233671
From micro to nano: MEMS as an interface to the nano world Published by ACM 2006 Article
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