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Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications

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Authors: Humberto Campanella Centro Nacional de Microelectrónica CNM-CSIC, Bellaterra - Barcelona, Spain
Arantxa Uranga Universitat Autònoma de Barcelona, Bellaterra - Barcelona, Spain
Pascal Nouet Laboratoire d'Informatique de Robotique et de Microélectronique de Montpellier LIRMM, Montpellier, France
Pedro De Paco Universitat Autònoma de Barcelona, Bellaterra - Barcelona, Spain
Nuria Barniol Universitat Autònoma de Barcelona, Bellaterra - Barcelona, Spain
Jaume Esteve Centro Nacional de Microelectrónica CNM-CSIC, Bellaterra - Barcelona, Spain
Instantaneous de-embedding of the on-wafer equivalent-circuit parameters of acoustic resonator (FBAR) for integrated circuit applications Published by ACM 2007 Article
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SBCCI '07 Proceedings of the 20th annual conference on Integrated circuits and systems design
ACM New York, NY, USA ©2007
table of contents ISBN: 978-1-59593-816-9 doi>10.1145/1284480.1284539

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