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ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction

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Authors: Minsik Cho Univ. of Texas at Austin, Austin, TX
Kun Yuan Univ. of Texas at Austin, Austin, TX
Yongchan Ban Univ. of Texas at Austin, Austin, TX
David Z. Pan Univ. of Texas at Austin, Austin, TX
ELIAD: efficient lithography aware detailed router with compact post-OPC printability prediction Published by ACM 2008 Article
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· Proceeding
DAC '08 Proceedings of the 45th annual Design Automation Conference
ACM New York, NY, USA ©2008
table of contents ISBN: 978-1-60558-115-6 doi>10.1145/1391469.1391598

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