Decoding nanowire arrays fabricated with the multi-spacer patterning technique

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Authors: M. Haykel Ben Jamaa Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland
Yusuf Leblebici Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland
Giovanni De Micheli Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland
Published in:
· Proceeding
DAC '09 Proceedings of the 46th Annual Design Automation Conference
Pages 77-82
ACM New York, NY, USA ©2009
table of contents ISBN: 978-1-60558-497-3 doi>10.1145/1629911.1629934
Decoding nanowire arrays fabricated with the multi-spacer patterning technique Published by ACM 2009 Article
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