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Creating an affordable 22nm node using design-lithography co-optimization

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Authors: A. J. Strojwas PDF Solutions Inc., San Jose, CA and Carnegie Mellon University, Pittsburgh, PA
T. Jhaveri PDF Solutions Inc., San Jose, CA and Carnegie Mellon University, Pittsburgh, PA
V. Rovner PDF Solutions Inc., San Jose, CA and Carnegie Mellon University, Pittsburgh, PA
L. Pileggi PDF Solutions Inc., San Jose, CA and Carnegie Mellon University, Pittsburgh, PA
Creating an affordable 22nm node using design-lithography co-optimization Published by ACM 2009 Article
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· Proceeding
DAC '09 Proceedings of the 46th Annual Design Automation Conference
ACM New York, NY, USA ©2009
table of contents ISBN: 978-1-60558-497-3 doi>10.1145/1629911.1629941

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