A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures

A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures

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Authors:	X. Cai	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA
	H. Yie	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA
	P. Osterberg	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA
	J. Gilbert	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA
	S. Senturia	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA
	J. White	Res. Lab. of Elec. and the Microsystems Tech. Lab., Depart. of Elec. Eng. and Comp. Sci., Mass. Inst. of Tech., Cambridge, MA

	1993 Article
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	· Proceeding
	ICCAD '93 Proceedings of the 1993 IEEE/ACM international conference on Computer-aided design
	IEEE Computer Society Press Los Alamitos, CA, USA ©1993 table of contents ISBN:0-8186-4490-7

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