A CAD tool for optical MEMS

doi:10.1145/309847.310092

A CAD tool for optical MEMS

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Authors:	Timothy P. Kurzweg	University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA
	Steven P. Levitan	University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA
	Philippe J. Marchand	University of California, San Diego, ECE Dept., La Jolla, CA
	Jose A. Martinez	University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA
	Kurt R. Prough	University of Pittsburgh, Dept. of Electrical Engineering, Pittsburgh, PA
	Donald M. Chiarulli	University of Pittsburgh, Dept. of Computer Science, Pittsburgh, PA

	1999 Article
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	DAC '99 Proceedings of the 36th annual ACM/IEEE Design Automation Conference
	ACM New York, NY, USA ©1999 table of contents ISBN:1-58113-109-7 doi>10.1145/309847.310092

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Tags: design design aids mems-cad micro-optics moems optical mems theory

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