Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability

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Authors: Ruiqi Tian Department of Computer Sciences, University of Texas at Austin, Austin, TX and Motorola Inc., 3501 Ed Bluestein Blvd., Austin, TX
D. F. Wong Department of Computer Sciences, University of Texas at Austin, Austin, TX
Robert Boone Motorola Inc., 3501 Ed Bluestein Blvd., Austin, TX
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· Proceeding
DAC '00 Proceedings of the 37th Annual Design Automation Conference
Pages 667-670
ACM New York, NY, USA ©2000
table of contents ISBN:1-58113-187-9 doi>10.1145/337292.337609
Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability Published by ACM 2000 Article
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