Productivity modeling of semiconductor manufacturing equipment

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Authors: Mark Pool Applied Materials, Inc., Santa Clara, CA
Robert Bachrach Applied Materials, Inc., Santa Clara, CA
Published in:
· Proceeding
WSC '00 Proceedings of the 32nd conference on Winter simulation
Pages 1423-1427
Society for Computer Simulation International San Diego, CA, USA ©2000
table of contents ISBN:0-7803-6582-8
Productivity modeling of semiconductor manufacturing equipment 2000 Article
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