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Efficient mixed-domain analysis of electrostatic MEMS

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Authors: Gang Li University of Illinois at Urbana-Champaign, Urbana, IL
N. R. Aluru University of Illinois at Urbana-Champaign, Urbana, IL
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· Proceeding
ICCAD '02 Proceedings of the 2002 IEEE/ACM international conference on Computer-aided design
ACM New York, NY, USA ©2002
table of contents ISBN:0-7803-7607-2 doi>10.1145/774572.774641
Efficient mixed-domain analysis of electrostatic MEMS Published by ACM 2002 Article
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