Abstract
Lithography simulation, an essential step in design for manufacturability (DFM), is still far from computationally efficient. Most leading companies use large clusters of server computers to achieve acceptable turn-around time. Thus coprocessor acceleration is very attractive for obtaining increased computational performance with a reduced power consumption. This article describes the implementation of a customized accelerator on FPGA using a polygon-based simulation model. An application-specific memory partitioning scheme is designed to meet the bandwidth requirements for a large number of processing elements. Deep loop pipelining and ping-pong buffer based function block pipelining are also implemented in our design. Initial results show a 15X speedup versus the software implementation running on a microprocessor, and more speedup is expected via further performance tuning. The implementation also leverages state-of-art C-to-RTL synthesis tools. At the same time, we also identify the need for manual architecture-level exploration for parallel implementations. Moreover, we implement the algorithm on NVIDIA GPUs using the CUDA programming environment, and provide some useful comparisons for different kinds of accelerators.
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Index Terms
FPGA-Based Hardware Acceleration of Lithographic Aerial Image Simulation
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