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(auto-classified)Gem #136: How tall is a kilogram?
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Stencil mask using ultra-violet-curable positive-tone electron beam resist
AbstractStencil masks are used in fabrication processes such as photolithography for circuit patterning and micro-electromechanical systems devices. A stencil mask has micro- and nano-scale through-hole patterns on a substrate, and the metal ...
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Highlights- Preparation of UV-curable positive-tone EB resist was succeeded.
- Slit and ...






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